Scientists publish four domain-expert JSON schemas for ALD and ALE processes to enable standardized representation and machine-actionable reuse
Read the original at arxiv.org→arXiv:2609.12139v1 Announce Type: new Abstract: Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering...
Original headline: "Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science"
Coverage timeline
- Sep 14, 04:00 UTC arXiv cs.AI lead source Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science