Physics-chemistry-informed neural network (PCINN) enables real-time SALD surface coverage prediction and reliable kinetics inversion
Read the original at arxiv.org→arXiv:2608.00212v1 Announce Type: new Abstract: Spatial atomic layer deposition (SALD) is a leading atmospheric-pressure, high-throughput route to industrial ALD, but design and control are limited by the cost of...
Original headline: "A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion"
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- Aug 4, 04:00 UTC arXiv cs.LG lead source A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion